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D.R. Swenson, et. al, SRF Materials Workshop, Fermilab, 23 May 2007
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=20 =20
D.R. Swenson, et. al, SRF Materials Workshop, Fermilab, 23 May 2007 &#= 13;
Treatment of SRF 1-cell test cavit= ies
f= or evaluation of the effect of
G= as Cluster Ion Beams
o= n high power cavity Q
D. R. Swenson1, A.T. Wu2<= /span>,  
Z. Insepov3
And others
1Epion Corporation, Billerica MA
2Thomas Jefferson Laboratory
3Argonne National Laboratory


I will talk about using Gas Cluster Ion Beams to improve the characteristics of = high voltage electrodes.  I inclu= ded this question as a thought to hold in the back of your mind.  It has been known for well over = 100 years that electrodes need to be clean and smooth to hold high voltages.<= span style=3D'mso-spacerun:yes'>  But how close have we come to ma= king an ideal electrode?
   This work has involved many collaborators.
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D.R. Swenson, et. al, SRF Materials Workshop, Fermilab, 23 May 2007 &#= 13;
TEL Epion Overview
300mm nFusion™ System
TEL Epion supplies “infusion” Gas Cluster= Ion Beam (GCIB) technology for surface and interface engineering.
For ultra thin laye= rs, infusion technology offers advantages over ion beams, plasma and CVD processes.
Our new 300mm  = nFusion™ = Processing System can be used for ultra shallow doping, channel mobility engineering, an= d Cu surface treatments to mitigate electromigration 
Infusion processing is a revolutionary new processing technique that requires a new process category. It is not just simply turning an ion implanter into an etcher or CVD tool. The processing results can not be entirely duplicated using standard beamline or plasma technologies.
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D.R. Swenson, et. al, SRF Materials Workshop, Fermilab, 23 May 2007 &#= 13;
Ultra Shallow Boron Junction
R. MacCrimmo= n, J. Hautala, M. Gwinn, S. Sherman,
Nucl. Instr. Meth. B. 242 (2006) 427
SIMS depth profiles
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